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Mass Flow Controllerの製品一覧

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Mass Flow Controller MODEL 8700/3660 SERIES

It is less affected by temperature and pressure, allowing for high-precision flow measurement and control! Gases such as N2, Air, H2, He, and Ar are the targets.

We would like to introduce our mass flow controllers, the 'MODEL 8700/3660 SERIES'. The mass flow controller/indicator "MODEL 8700 SERIES" features analog input/output of 0-5VDC (which can be changed to 4-20mA) and offers various functions such as instantaneous/integrated flow display and alarm settings. The standard mass flow controller "MODEL 3660 SERIES" accommodates a wide flow range from F.S. 10 SCCM to F.S. 100 SLM, equivalent to N2. 【Features】 ■ Applicable fluids: Gases such as N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: Gases from 10 SCCM to 100 SLM ■ Accuracy: ±1 to 1.5% F.S. ■ Supports a wide flow range (from F.S. 10 SCCM to F.S. 100 SLM equivalent to N2) ■ Analog input/output can be changed via the display (MODEL 8700 SERIES) *For more details, please refer to the PDF document or feel free to contact us.

  • Other measurement, recording and measuring instruments

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PI Mass Flow Controller "MODEL ST-500"

Metal seal MFC with diaphragm-type valve! Compatible with corrosive fluids due to EP treatment and oxidation film treatment.

The "MODEL ST-500 SERIES" is a mass flow controller equipped with PI functionality (Pressure Insensitive). It features a pressure sensor installed before the flow sensor, which captures pressure fluctuations and compares them to the pressure before the fluctuation, allowing for real-time adjustments to the valve opening. This enables stable flow control in response to pressure variations. It is suitable for gas supply processes that require stability and accuracy, such as semiconductor manufacturing equipment. 【Features】 ■ Stable flow control in response to pressure fluctuations (only for ST-500) ■ Supports DeviceNet, EtherCAT, and RS485 (only for ST-550) ■ Compatible with IGS W seal fittings ■ High-precision measurement control with S.P. accuracy, response time within 1 second across the entire flow control range ■ Multi-range function via a dedicated app (30-100% F.S.) *For more details, please download the PDF or feel free to contact us.

  • Flow Control

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